Deep UV (DUV) Coating
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Key working wavelength:
- AR/ HR for 193nm
- AR/ HR for 266nm
- AR/ HR for 355nm and Laser coating
- Able to provide Customized coating for 193~355nm
Key coating materials:
MgF2/LaF3; Al2O3/SiO2; HfO2/SiO2
Substrates:
Lens, prisms, windows etc.
Material: UV grade FS
Typical dimension: 2mm~150mm
193nm AR and HR coating | |
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AR for 193nm (T>98.5% AOI:00) 
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HR for 193nm (R>96% AOI:00) 
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HR coating for 266nm and 308nm | |
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HR for 266nm (R>99.5%, AOI: 00) 
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HR for 308nm (Random>99.5%, AOI: 450) 
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Laser coatings for 355nm | |
Absorption Test station for 355nm  |
Absorption for HR coating at 355nm (<100ppm) internal test  |
LIDT test station for 355nm  |
LIDT for HR coating at 355nm (>4J/cm2 10ns, tested in Spica  |